Thermal MEMS Accelerometers


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MEMSIC MXP7205VF is an AEC-Q100 qualified high-performance dual-axis thermal accelerometer. Its operation is based on our patented MEMS-thermal technology which provides key beneficial operating characteristics for automotive applications. Our sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of ~30Hz eliminating errors attributable to gravel strikes and other out-of-band accelerations. It has excellent 0g and sensitivity stability over the full operating temperature range. It is built monolithically using a standard 0.6um CMOS process. There are truly no moving parts and no error causing sensor structure resonances thus providing more accurate acceleration measurements with lower field failures than competitive technology.  It has no measureable thermal or mechanical hysteresis. It is ideally suited for in-vehicle low-g acceleration measurement applications. A SPI interface is used to communicate with this device and access the robust self-test features needed for critical safety applications. Shock survival is greater than 50,000g.

Axes 2(XY)
Range 5
Output SPI
Sens'ty 800 c/g
Offset Drift 1
BW 29
Noise 2.7
Supply Voltage 4.5 - 5.2
Size 5 x 5
Auto Qual'd Y
Temp Comp On
Price (1k) Call
  • Fully Integrated Thermal Accelerometer
  • X/Y Axis, 800LSB/g (1.2mg Resolution)
  • 0g Temperature Drift less than ±30mg
  • Sensitivity Temperature drift less than 3%
  • Inherent 29Hz Low Pass Filter Response (Vibration Immunity)
  • SPI Interface
  • Continuous and On Demand Self Tests
  • Operating Temperature Range from -40 to 105C
  • Shock Survival Greater than 50,000 g
  • Operating Supply Voltage from 4.5V to 5.5V
  • Package Size 5x5x2mm


  • Electronic Stability Control
  • Hill Start Assist
  • Roll Detection

Inclination Sensing (<0.1 degree resolution)

  • Man lift Inclination Tilt Switches
  • Construction Vehicle Safe Operating Angle
  • Crane Boom and Platform Angle

General Purpose High Performance Acceleration Measurements