Thermal MEMS Accelerometers


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MEMSIC MXD2020EL is a non-temperature compensated high-performance XY thermal accelerometer with very low 0g offset drift versus temperature. The MXD2020EL is very repeatable and immune from mechanical shocks changing its operating characteristics making it ideal for demanding applications where a user temperature calibration will be applied on a per device basis to achieve the performance needed for the most demanding applications. In addition to the acceleration outputs, the MXD2020EL also provides a very repeatable analog temperature output which can be used for the over temperature calibration. Thermal MEMS sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of 17Hz eliminating errors attributable to out-of-band and not-of-interest higher frequency accelerations.  It is built monolithically using a standard 0.6um CMOS process. There are truly no moving parts and no error causing sensor structure resonances thus providing more accurate acceleration measurements with lower field failures than competitive technology.  Acceleration outputs are analog. Shock survival is greater than 50,000g. 

Axes 2(XY)
Range 1
Output PWM
Sens'ty 20 %/g
Offset Drift 0.4
BW 17
Noise 0.8
Supply Voltage 3.0 - 5.3
Size 5 x 5
Temp Output Y
Temp Comp Off
Price (1k) Call
  • Fully Integrated Thermal Accelerometer
  • X/Y Axis, 20%/g PWM Output
  • ANalog Temperature Output 7mV/C
  • 0g Temperature drift of 0.4mg/C
  • 3V to 5V Single Power Supply Operation
  • Inherent 17Hz Low Pass Filter Response (Vibration Immunity)
  • Operating Temperature Range from -40 to 105C
  • Shock Survival Greater than 50,000 g
  • Package Size 5x5x2mm

Single Axis Inclination Sensing Using Arctangent(X/Y) Method

Pitch and Roll Sensing using Arcsine Method. Requires a user supplied temperature compensation