Thermal MEMS Accelerometers


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MEMSIC MXC6232xMP is a general porpose high-performance XY thermal accelerometer. Its operation is based on our patented MEMS-thermal technology which provides key beneficial operating characteristics for many industrial and consumer applications. Thermal MEMS sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of 17Hz eliminating errors attributable to out-of-band and not-of-interest higher frequency accelerations. For demanding applications performance can be increased through a secondary temperature calibration because it has excellent repeatability before and after mechanical shock events and no has temperature hysteresis. Temperature is available over the I2C interface. It is built monolithically using a standard 0.6um CMOS process. There are truly no moving parts and no error causing sensor structure resonances thus providing more accurate acceleration measurements with lower field failures than competitive technology.  It is well suited for all low-g acceleration measurement applications. Acceleration and temperature outputs are available over the I2C interface. 

Axes 2(XY)
Range 2
Output I²C
Sens'ty 512 c/g
Offset Drift 0.8
BW 17
Noise 0.7
Supply Voltage 2.7 - 3.6
Sleep Mode Y
Size 5 x 5
Temp Output Y
Temp Comp On
Price (1k) Call

Fully Integrated Thermal Accelerometer
X/Y Axis, 512 LSB /g
0g Temperature Drift <0.8mg/C
Inherent 17Hz Low Pass Filter Response (Vibration Immunity)
I2C Interface (400kHz Fast Mode)
Operating Supply Voltage from 2.7V to 3.6V
Operating Temperature Range from -40 to 85C
Shock Survival Greater than 50,000 g
Package Size 5x5x1.55mm

General Purpose High Performance Acceleration Measurements
Inclination Sensing (<0.1 degree resolution)
Vehicle “Black box”
Washing Machine Out-Of-Balance Detection