Thermal MEMS Accelerometers


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MEMSIC MXP7305VF is an AEC-Q100 qualified high-performance dual-axis thermal accelerometer. Its operation is based on our patented MEMS-thermal technology which provides key beneficial operating characteristics for automotive applications. Our sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of ~30Hz eliminating errors attributable to gravel strikes and other out-of-band accelerations. It has excellent 0g and sensitivity stability over the full operating temperature range. It is built monolithically using a standard 0.6um CMOS process. There are truly no moving parts and no error causing sensor structure resonances thus providing more accurate acceleration measurements with lower field failures than competitive technology.  It has no measurable thermal or mechanical hysteresis. It is ideally suited for in-vehicle low-g acceleration measurement applications. Acceleration outputs are available in a ratiometric analog output and a dedicated On-Demand Self test pin is used to ensure correct operation for critical safety applications. Factory Measured data on each device is available for implementing a secondary temperature compensation in the end application providing increased over temperature performance. Shock survival is greater than 50,000g. 

Axes 2(XY)
Range 5
Output Analog
Sens'ty 0.25 V/g
Offset Drift 2
BW 27
Noise 3.1
Supply Voltage 4.5 - 5.3
Size 5 x 5
Auto Qual'd Y
Temp Comp On
Price (1k) Call
  • Fully Integrated Thermal Accelerometer
  • X/Y Axis, 250mV/g
  • 0g Temperature Drift less than ±80mg (±40mg with Using Secondary Compensation Data)
  • Sensitivity Temperature drift -6 to +3%  (±3% with Using Secondary Compensation Data)
  • Inherent 27Hz Low Pass Filter Response (Vibration Immunity)
  • Continuous and On Demand Self Tests
  • Operating Temperature Range from -40 to 95C
  • Shock Survival Greater than 50,000 g
  • Operating Supply Voltage from 4.5V to 5.5V
  • Package Size 5x5x2mm


  • Electronic Stability Control
  • Hill Start Assist
  • Roll Detection
  • Blackbox Recorders
  • Driving Habit Monitoring

Inclination Sensing (<0.1 degree resolution)
Man lift Inclination Tilt Switches
Construction Vehicle Safe Operating Angle
Crane Boom and Platform Angle
General Purpose High Performance Acceleration Measurements