Thermal MEMS Accelerometers


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MEMSIC MXR6500MP is a general purpose high-performance XY thermal accelerometer. Its operation is based on our patented MEMS-thermal technology which provides key beneficial operating characteristics for many industrial and consumer applications. Thermal MEMS sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of 17Hz eliminating errors attributable to out-of-band and not-of-interest higher frequency accelerations. For demanding applications performance can be increased through a secondary temperature calibration because it has excellent repeatability before and after mechanical shock events and no has temperature hysteresis. It is built monolithically using a standard 0.6um CMOS process. There are truly no moving parts and no error causing sensor structure resonances thus providing more accurate acceleration measurements with lower field failures than competitive technology.  It is well suited for all low-g acceleration measurement applications. Acceleration outputs are available in ratiometric analog outputs which track the supply voltage. Shock survival is greater than 50,000g. 

Axes 2(XY)
Range 1.7
Output Analog
Sens'ty 0.5 V/g
Offset Drift 1.5
BW 17
Noise 1.6
Supply Voltage 2.7 - 3.6
Size 5 x 5
Temp Comp On
Price (1k) Call
  • Fully Integrated Thermal Accelerometer
  • Low Power Consumption 2.0mA @3V
  • X/Y Axis, 500mV/g
  • 0g Temperature drift  of 1.5mg/C
  • Inherent 17Hz Low Pass Filter Response (Vibration Immunity)
  • Operating Temperature Range from -40 to 85C
  • Shock Survival Greater than 50,000 g
  • Package Size 5x5x1.55mm
  • General Purpose High Performance Acceleration Measurements
  • Inclination Sensing (<0.1 degree resolution)
  • Vehicle “Black box”
  • Washing Machine Out-Of-Balance Detection
  • Gaming