Thermal MEMS Accelerometers


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MEMSIC MXC6232xEP is a non-temperature compensated high-performance XY thermal accelerometer with very low 0g offset drift versus temperature. The MXC6232xEP is very repeatable and immune from mechanical shocks changing its operating characteristics making it ideal for demanding applications where a user temperature calibration will be applied on a per device basis to achieve the performance needed for the most demanding applications. In addition to the acceleration outputs, the MXC6232xEP also provides a very repeatable temperature reading which can be used for the over temperature calibration. Thermal MEMS sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of 17Hz eliminating errors attributable to out-of-band and not-of-interest higher frequency accelerations.  It is built monolithically using a standard 0.6um CMOS process. There are truly no moving parts and no error causing sensor structure resonances thus providing more accurate acceleration measurements with lower field failures than competitive technology.  Acceleration and temperature data is available over the I2C interface. Shock survival is greater than 50,000g. 

Axes 2(XY)
Range 1.5
Output I²C
Sens'ty 512 c/g
Offset Drift 0.8
BW 17
Noise 2.9
Supply Voltage 2.7 - 3.6
Sleep Mode Y
Size 5.5 x 5.5
Temp Output Y
Temp Comp Off
Price (1k) Call
  • Fully Integrated Thermal Accelerometer
  • X/Y Axis, 512 LSB /g
  • Termperature resolution of 0.22 C/LSB
  • 0g Temperature Drift 0.4mg/C Typical
  • Inherent 17Hz Low Pass Filter Response (Vibration Immunity)
  • I2C Interface (400kHz Fast Mode)
  • Operating Supply Voltage from 2.7V to 3.6V
  • Operating Temperature Range from -40 to 85C
  • Shock Survival Greater than 50,000 g
  • Package Size 5x5x1.55mm
  • High Accuracy Inclination Sensing using the ArcTan(X/Y) Method
  • High Accuracy Inclination Sensing requiring an over temperature calibration.