June 6, 2012

Proprietary Monolithic Thermal Technology Provides Enhanced Performance
with Higher Reliability

Andover, MA — June 6, 2012 — MEMSIC Inc. (NASDAQ:MEMS), a leading MEMS sensing solution provider, today announced the availability of the MFA1100R gas flow sensor module, the first member of its new product line addressing the gas flow market.  The product is being showcased in Booth #1019 at the Sensors Expo 2012 on June 6 – 7, 2012. 

MEMSIC’s monolithic thermal technology, based on the same approach used in its highly successful accelerometer products, uses a precise differential temperature measurement to determine flow rate.  There are no moving parts in the system, offering a number of advantages over other sensing technologies, including high dynamic range (turn-down ratio and sensitivity) and high reliability (no wear mechanisms), as well as small size, low power consumption, and fast response time.

The MFA1100R is a complete, fully integrated gas flow sensor module.  The sensing element is integrated in a monolithic CMOS process together with on-chip signal processing and embedded software.   The device operates over a flow range of 0 to 100SLM, and has a very low startup rate of 0.2 SLM, and a turndown ratio greater than 500:1. Other key specifications include an accuracy of +/-1.5%, repeatability and hysteresis of better than +/- 1.0% and response time of better than 100 ms. The MFA1100R is compatible with a wide range of gasses and exhibits a very low power dissipation of 3.0 mw (under continuous operation) and operates over the -20 to + 60 degree C temperature range.

John Newton, MEMSIC’s Vice President of Marketing, said, “Our MFA1100R Thermal Gas Flow Module uses the identical proprietary thermal MEMS technology used in our thermal accelerometer, of which we have shipped hundreds of millions of parts into a

variety of applications, including the highly demanding automotive sector. We have proven the reliability and robustness of the MFA1100R through extensive field trials and are pleased that the device has already gained significant traction in the residential gas meter market.

“We believe the superior reliability, performance and cost of this technology compared with traditional mechanical devices will be disruptive, driving its adoption into a broad range of industrial, medical, and residential flow applications. The product line’s modular design can be adapted to a wide range of mechanical packages, while additional functionality can be easily added due to the standard CMOS IC technology.”

The MFA1100R design is a full electronic MEMS gas flow sensor module, making it easy to integrate into either a wired or a wireless system, such as the MEMSIC eKo system, enabling it to be used to create an Advanced Metering Infrastructure (AMI or Smart Meter).  The MFA1100R is RoHS compliant and operates from 2.7 to 5.5 V. 

MEMSIC will make a variety of other modules available, suitable for demanding applications including portable medical instruments, gas analysis instruments, process control instruments, HVAC systems, automotive engine control and a wide spectrum of industrial applications.

Price and Delivery

The MEMSIC MFA1100R gas flow sensor module is available immediately in sample quantities.  Unit pricing is $199 at 10 unit quantities. Contact MEMSIC Sales for high volume pricing and delivery information.

For More Information

One Tech Drive   Suite 325
Andover, MA 01810
Tel: 978-738-0900
Fax: 978-738-0196


MEMSIC Inc., headquartered in Andover, Massachusetts, provides advanced semiconductor and multi-sensor systems solutions to its worldwide group of customers based on its micro-electromechanical systems (MEMS) technologies in both IC and module level.  MEMSIC’s unique and proprietary approach combines leading-edge sensor technologies, such as magnetic sensors and accelerometers., with mixed signal processing circuitry  to produce reliable, high-quality, and cost-effective solutions for a wide spectrum of applications including mobile phones, tablets, automotive, consumer, industrial and general aviation.  The company’s shares are listed on the NASDAQ Exchange (NASDAQ GM: MEMS).


Editors’ Note
A detailed data sheet on the MFA1100R as well as high resolution jpg/tif  images are available on the MEMSIC FTP site (  User Name : DistPress, Password : 20press12.



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